1.0INLhttps://inl.intrich600338<blockquote class="wp-embedded-content" data-secret="9qnO1A0RjE"><a href="https://inl.int/community/ines-garcia/">Inês Garcia</a></blockquote><iframe sandbox="allow-scripts" security="restricted" src="https://inl.int/community/ines-garcia/embed/#?secret=9qnO1A0RjE" width="600" height="338" title="“Inês Garcia” — INL" data-secret="9qnO1A0RjE" frameborder="0" marginwidth="0" marginheight="0" scrolling="no" class="wp-embedded-content"></iframe><script type="text/javascript"> /* <![CDATA[ */ /*! This file is auto-generated */ !function(d,l){"use strict";l.querySelector&&d.addEventListener&&"undefined"!=typeof URL&&(d.wp=d.wp||{},d.wp.receiveEmbedMessage||(d.wp.receiveEmbedMessage=function(e){var t=e.data;if((t||t.secret||t.message||t.value)&&!/[^a-zA-Z0-9]/.test(t.secret)){for(var s,r,n,a=l.querySelectorAll('iframe[data-secret="'+t.secret+'"]'),o=l.querySelectorAll('blockquote[data-secret="'+t.secret+'"]'),c=new RegExp("^https?:$","i"),i=0;i<o.length;i++)o[i].style.display="none";for(i=0;i<a.length;i++)s=a[i],e.source===s.contentWindow&&(s.removeAttribute("style"),"height"===t.message?(1e3<(r=parseInt(t.value,10))?r=1e3:~~r<200&&(r=200),s.height=r):"link"===t.message&&(r=new URL(s.getAttribute("src")),n=new URL(t.value),c.test(n.protocol))&&n.host===r.host&&l.activeElement===s&&(d.top.location.href=t.value))}},d.addEventListener("message",d.wp.receiveEmbedMessage,!1),l.addEventListener("DOMContentLoaded",function(){for(var e,t,s=l.querySelectorAll("iframe.wp-embedded-content"),r=0;r<s.length;r++)(t=(e=s[r]).getAttribute("data-secret"))||(t=Math.random().toString(36).substring(2,12),e.src+="#?secret="+t,e.setAttribute("data-secret",t)),e.contentWindow.postMessage({message:"ready",secret:t},"*")},!1)))}(window,document); //# sourceURL=https://inl.int/wp-includes/js/wp-embed.min.js /* ]]> */ </script> Inês S. Garcia received the Ph.D. degree in electronics and computer engineering from the University of Minho, Guimarães, Portugal, in 2024. She is a MicroElectroMechanical Systems (MEMS) Research Engineer with the Integrated Micro and Nanotechnologies at INL. Her expertise is focused on the design, fabrication, and characterisation of MOEMS and MEMS devices. Her research interests range from inertial sensors ( e.g., acceleration and shock sensing based on pull-in transduction) to optical scanning and splitting devices. She has extensive experience in SOI-based microfabrication, taking advantage of different lithography techniques, such as grayscale to nanoimprint, to create self-aligned multilevel MEMS structures. Go to Research Group Selected Publications Flexible Pressure and Temperature Microsensors for Textile-Integrated WearablesACTUATORS, 2024 Nanoimprint lithography for grayscale pattern replication of MEMS mirrors in a 200 mm waferJOURNAL OF MANUFACTURING PROCESSES, 2024 Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometersMICRO AND NANO ENGINEERING, 2023 ULTRA-LOW NOISE, HIGH-SENSITIVITY MEMS ACCELEROMETER FOR SATELLITE GRAVIMETRYHilton Head Workshop 2022: A Solid-State Sensors, Actuators and Microsystems Workshop, 2022 Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale LithographyJOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020https://hub.inl.int/photos/337.jpg